The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
Jan. 16, 1996
Applicant:
Inventors:
Jeffrey D Chinn, Foster City, CA (US);
Justin Lowe, Los Altos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
7386471 ; 7386433 ;
Abstract
A surface particle sampling head having a rotatable probe The sampling head contains a handle, a probe and a joint connecting the handle to the probe such that the probe rotates relative to the handle. Preferably, the rotatable joint is a universal joint that enables the probe to gimbal relative to the handle. The probe further contains a manifold having a releasably attached face plate.