The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
Apr. 15, 1997
Jay Kuang-Jieh Tu, Berkeley, CA (US);
Mauro Ferrari, Lafayette, CA (US);
The Regents of the University of California, Oakland, CA (US);
Abstract
A microfabricated filter made up of two bonded substrate structures, each consisting of single crystalline silicon can optionally be formed into a capsule. The pores of the filter consist of one or more channels disposed between the two substrate structures. The width of the channels are defined by a thickness of a sacrificial layer formed on one of the substrate structures. The filter includes pores having a precisely controlled pore width which may be as small as 5 nanometers. The filter provides a relatively high mechanical strength relative to filters having polycrystalline silicon structures and also has a high throughput and can be modified to have high resistance to adsorption of particles.