The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
Jun. 02, 1995
Applicant:
Inventor:
John Reece Roth, Knoxville, TN (US);
Assignee:
The University of Tennessee Research Corporation, Knoxville, TN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F / ;
U.S. Cl.
CPC ...
134-1 ; 1566431 ; 156345 ; 1563 / ; 216 67 ; 216 72 ;
Abstract
The surface of a workpiece is cleaned by generating a steady-state one atmosphere glow discharge plasma above the surface of the workpiece. The use of one atmosphere, uniform glow discharge plasmas generated by a low frequency RF ion trapping mechanisms is preferred. The plasma used to effect surface cleaning may be formed in atmospheric air or other gases at about one atmosphere of pressure, or at pressures below or above one atmosphere.