The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
Mar. 19, 1997
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A cap for a vertical furnace includes a first flat plate and a second flat plate separated by a predetermined distance, and a plurality of support rods connecting the first and second flat plates. A plurality of adjacent and horizontally disposed adiabatic plates are vertically stacked between the first and the second flat plates such that edges of the adiabatic plates contact the support rods. The first and second flat plates, adjacent adiabatic plates, and the plurality of support rods are integrally formed in a single structure. Since all the components of the cap are formed in single structure, installation and replacement is simplified and the generation of contamination particles is prevented since no parts need to be repeatedly assembled and disassembled.