The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1999
Filed:
Jan. 21, 1997
Joo-young Lee, Kyungki-do, KR;
Abstract
A second insulating layer is used to mask a first insulating layer on a second gate electrode, during fabrication of a conductive contact adjacent a first gate electrode which is spaced apart from the second gate electrode. By using the second insulating layer as a sacrificial insulating layer during etching of the conductive contact, thinning of the first insulating layer on the second gate electrode may be prevented. In particular, first and second spaced apart gate electrodes are formed on an integrated circuit surface. The first and second spaced apart gate electrodes include first and second sidewalls, respectively. The first insulating layer and the second insulating layer are formed on the integrated circuit surface, including on the first and second gate electrodes. The second insulating layer is removed from the first gate. The first insulating layer is etched on the first gate to thereby form first spacers on the first sidewalls. A conductive contact is formed on the integrated circuit face, adjacent the first gate electrode and extending onto the first sidewall. The second insulating layer is removed from on the second gate and the first insulating layer is etched on the second gate, to thereby form second spacers on the second sidewalls.