The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 1999
Filed:
Apr. 23, 1996
Patrick Anthony Begley, West Melbourne, FL (US);
Donald Frank Hemmenway, Melbourne, FL (US);
George Bajor, Melbourne, FL (US);
Anthony Lee Rivoli, Palm Bay, FL (US);
Jeanne Marie McNamara, Palm Bay, FL (US);
Michael Sean Carmody, Palm Bay, FL (US);
Dustin Alexander Woodbury, Indian Harbour Beach, FL (US);
Harris Corporation, Palm Bay, FL (US);
Abstract
A bonded wafer 100 has a device substrate 16 with isolation trenches 30 defining device regions 18. Oxide dogbone structures are removed before filling trenches 30. Voids 36 in the trenches are spaced from the top of the trenches. The trenches are covered with an oxide layer 30 and filled with polysilicon 34. A LOCOS mask structure comprising a layer of CVD pad oxide and silicon nitride 50 cover the trenches and the adjacent device substrate regions.