The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 1999
Filed:
Nov. 13, 1996
Applicant:
Inventors:
Tetsuya Hayashi, Kawasaki, JP;
Kazunori Okuyama, Aizuwakamatsu, JP;
Tsuyoshi Inomata, Kawasaki, JP;
Koji Nozaki, Kawasaki, JP;
Minoru Hirose, Kawasaki, JP;
Assignees:
Fujitsu Limited, Kawasaki, JP;
Fujitsu Tohoku Electronics Ltd., Aizuwakamatsu, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118719 ; 156345 ; 20429825 ; 20429835 ;
Abstract
A semiconductor device producing apparatus includes a first transporter which moves a substrate to a first unit to undergo at least a first process, and a second transporter, other than the first transporter, which moves the substrate to a second unit, to undergo at least a second process.