The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Nov. 14, 1996
Applicant:
Inventor:
Sang Hoon Park, Ichon-Shi, KR;
Assignee:
Hyundai Electronics Industries, Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438629 ; 438636 ; 438648 ; 438672 ; 438906 ;
Abstract
The present invention relates to a method of forming a tungsten plug of a semiconductor device. After forming the tungsten plug in the contact hole, a tungsten residue existed in a portion except a contact hole is oxidized by oxidation and removed. The oxidation process is performed using a chemical mixture of hydrogen peroxide and ultrapure water. A metal wiring pattern including a reflection prevention layer can also be provided on the tungsten plug prior to the residue oxidation and removal.