The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Jul. 10, 1996
Applicant:
Inventor:
Michel Vilain, St Georges de Commiers, FR;
Assignee:
Commissariat a l'Energie, Paris, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438 52 ;
Abstract
A method of manufacturing elements of floating rigid microstructures and a device equipped with such elements. This method of manufacturing at least one element of a microstructure (104, 116) in a substrate including a stacking of a support layer (100), a layer (102) of sacrificial material and a structure layer (104) comprises the following steps:
Quick Actions:
Vilain, Michel. (1999). Method of manufacturing rigid floating microstructure elements and a (U.S. Patent No. 5930594). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5930594
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