The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
May. 19, 1997
Applicant:
Inventor:
Yong-Ki Min, Seoul, KR;
Assignee:
Daewoo Electronics Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
359291 ; 359292 ;
Abstract
An inventive array of M.times.N thin film actuated mirrors includes an active matrix and an array of M.times.N actuating structures. Each of the actuating structures includes a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member, a conduit and an insulating member. In the array, the insulating member is made of an insulating material, e.g., oxide or nitride, and is formed between top of the conduit and bottom of the first thin film electrode, thereby reducing the possibility of an electrical contact forming between the first and the second thin film electrodes.