The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
May. 20, 1998
Ahead Optoelectronics, Inc., Taipei, TW;
Abstract
An integrating sphere ellipsometer includes an incident light polarization control unit, a reflective light polarization analysis unit, an integrating sphere and a total integrated scattered light detector. The incident light polarization control unit and the reflective light polarization analysis unit jointly function as an ellipsometer to obtain information such as film thickness and material complex refractive indices. Concurrently, the identical incident light polarization control unit, the total integrated scattered light detector and the integrating sphere unite to function as an integrating sphere analyzer to measure material defects, surface roughness, surface particulates, micropollutants, etc.