The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Feb. 07, 1997
Andre Rochet, Meylan, FR;
Pascal DeCamps, Meylan, FR;
STMicroelectronics, S.A., Gentilly, FR;
Abstract
The invention relates to a dimensional control device for semiconductor wafer transport cassettes. Each cassette has a base from which extend vertical walls including horizontal grooves designed to receive wafers by lateral insertion. The device includes a seat provided with positioning guides of a cassette base; switches placed on the seat so that the actuation of all the switches by the positioned base indicate a suitable planarity of the base; a drawer mounted slidably on the seat so as to be engageable in the cassette in the insertion direction of the wafers, and having at least one template corresponding to a high position groove of the cassette; and a stop placed on the seat, at the side opposite to the drawer with respect to the cassette, to cause a tilting of the cassette when the drawer is moved towards the cassette and the template does not correspond to the cassette.