The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Oct. 27, 1998
Takeshi Yakou, Tokyo, JP;
Tomoyuki Kubota, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An apparatus for manufacturing a chamber, the chamber including first and second glass substrates and an enclosure arranged between the substrates or an enclosure and at least one spacer arranged between the substrates. The apparatus includes a pair of heating plates, having heaters therein, for holding the glass substrates, a temperature controller for controlling the temperature of the heaters, a position alignment device for moving at least one of the pair of heating plates in X-, Y-, and .theta.-directions, a first driving device for driving the position alignment device, a second driving device for moving at least one of the pair of heating plates in a Z-direction, an image monitoring device for monitoring the positions of the first and second substrates, and a control device for supplying a command to one of the first and second driving devices on the basis of information supplied from the image monitoring device