The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Sep. 16, 1996
Isao Suzuki, Tokyo, JP;
MKS Japan, Inc., Tokyo, JP;
Abstract
A flow control valve includes a valve member mounted in a valve chamber having an inlet port, through which a fluid flows into the valve chamber, and an outlet port through which the fluid flows out of the valve chamber. The valve member is slidable in the valve chamber in response to a driving force applied from an actuator. Valve seat member is mounted in the valve chamber in opposed relation to the valve member, the valve seat member cooperating with the valve member to control a rate of flow of the fluid. The valve seat member has at least a first hole formed therein and extending in a direction of driving of the valve member, a second hole formed therein and extending from an outer peripheral surface thereof and a third hole which is separated from the first hole and extends from its surface facing the valve member to the second hole in a direction of driving of the valve member, the second hole extending in a direction substantially perpendicular to the direction of driving of the valve member. A gap is provided in the valve chamber, so that when the valve member is disengaged from the valve seat member, there are formed a first flow passage, through which the fluid flows from the inlet port to the outlet port via the first holes, and a second flow passage through which the fluid flows from the inlet port to the outlet port via the first, the second and the third holes.