The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Oct. 25, 1996
Applicant:
Inventors:
Abdelhak Bensaoula, Houston, TX (US);
John Gregory Hollingshead, Austin, TX (US);
Lawrence Frank Latham, Jr, Austin, TX (US);
Assignee:
Inpod, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D / ; F16K / ; F16K / ;
U.S. Cl.
CPC ...
137599 ; 137375 ; 25112906 ; 251331 ;
Abstract
A valve to allow digitally addressable flow controllers is provided. An array of micromachined valves having a range of flow capacities and individually addressable while functioning in an On/Off mode allows flow controllers and similar devices high resolution, linearity and reproducibility. The incorporation of diamond or diamond-like materials in all flow paths extends the application of the valves to corrosive materials and permits higher process temperatures and lower particulate generation.