The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Sep. 25, 1998
Byeong-Soo Kim, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A megasonic cleaning system includes a transducer on which a substrate to be cleaned is placed. An oscillating electrically energy source is coupled to the transducer for driving the transducer to produce acoustical energy at substantially megasonic frequencies to vibrate the substrate. A blower assembly is arranged over the substrate, and the blower assembly contains a hollow elongate member having a plurality of nozzles spaced along a length thereof. A drive mechanism is connected to the blower assembly such that the blower assembly is horizontally movable relative to the surface of the substrate. A source of cleaning fluid is in flow communication with the nozzles, and the nozzles are arranged such that a flow path of cleaning fluid through the nozzles is inclined toward an upper surface of the substrate to be cleaned. A vacuum source is in flow communication with the substrate for vacuum-adhering the substrate on the transducer via a vacuum force. The cleaning fluid flowing through the nozzles is directed toward the upper surface of the substrate to blow away particles on the upper surface of the substrate that are dislodged by the vibration of the substrate.