Method of forming lightly-doped drain by automatic psg doping

Abstract

A method of forming a LDD fabrication by automatic phosphoric silicate glass (PSG) doping is disclosed herein. A phosphoric silicate glass serves as a diffusion source. The phosphorous ions of phosphoric silicate glass can be driven into a substrate to form a lightly-doped drain (LDD)by a high temperature during a thermal annealing process. The diffusion method can prevent from the damage in the substrate and the increasing of leakage current. Additionally, a thermal oxide layer is formed on the gate electrode and the surface of the substrate by the thermal oxidation process. The thermal oxide layer can prevent ions from sequentially diffusing into the substrate during the subsequent thermal treatment process. Therefore, the present invention can effectively control the impurity concentration of the lightly-doped drain (LDD) to prevent from the impurity concentration of the LDD over high.