The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 1999
Filed:
Jun. 27, 1997
Fuji Electric Co., Ltd., Kanagawa, JP;
Abstract
In a capacitive differential pressure detector, an insulating plate (1) of a fixed electrode is covered with a gold conductive film. A conductive film (2) integrally includes an entire inner area (2a) of a center hole (1a), a square ring-shaped area (2b) surrounding the center hole (1a) on the side opposite to the conductive plate (12) and a band-shaped area (2c) extending therefrom in a centrifugal direction to reach the outer periphery. The conductive film (2) is electrically communicated with the conductive plate at the terminating position of the entire inner area (2a) and also with aluminum films at the terminating position of the band-shaped area (2c). Therefore, the total area of the ring-shaped area (2b) and the band-shaped area (2c) can be decreased so that Cs1+Cs2 is decreased to improve the static pressure span characteristic.