The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 13, 1999

Filed:

Feb. 04, 1997
Applicant:
Inventors:

Julius K Botka, Santa Rosa, CA (US);

David R Veteran, Santa Rosa, CA (US);

Assignee:

Hewlett-Packard Company, Palo Alto, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324758 ; 324765 ;
Abstract

A compliant wafer prober docking adapter provide compliant docking capability which permits a test head to be floated (to come down) to the top portion of the compliant adapter. The compliant adapter includes a compliant spring mechanism in the form of coiled springs which support a portion of the weight of the test head and wherein the upper portion of the adapter automatically aligns itself with the test head. This desirable aspect allows for all of the connectors to be seated properly, such that the locking of a cam locking mechanism provides a compliant and secure mating between the two surfaces. Also, a test head can be easily moved from one wafer prober to another, because the alignment of the adapter to the wafer is not being disturbed. Hence, the head can be moved between stations very quickly without having to go through another long and complex re-alignment process


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