The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 13, 1999

Filed:

Oct. 15, 1996
Applicant:
Inventors:

Michael B Cain, Corning, NY (US);

Robert B Desorice, Corning, NY (US);

William J Kiefer, Horseheads, NY (US);

Dale R Powers, Painted Post, NY (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03B / ;
U.S. Cl.
CPC ...
65531 ; 65 174 ; 65144 ; 118724 ; 239422 ; 239424 ; 2394245 ;
Abstract

A precision burner for oxidizing halide-free, silicon-containing compounds, such as, octamethylcyclotetrasiloxane (OMCTS), is provided. The burner includes a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a raised face (162) on the burner mounting block (107), and a recess (160) in the back of the subassembly (13). The burner's face includes four concentric gas-emitting regions: a first central region (36, 90) from which exits a mixture of OMCTS and O.sub.2, a second innershield region (38, 92) from which exits N.sub.2, a third outershield region (40, 42, 94, 96) from which exits O.sub.2, and a fourth premix region (44, 98) from which exits a mixture of CH.sub.4 and O.sub.2. The burner provides more efficient utilization of halide-free, silicon-containing raw materials than prior burners.


Find Patent Forward Citations

Loading…