The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 1999
Filed:
Feb. 13, 1998
Applicant:
Inventors:
Masahiro Nakajo, Hirakata, JP;
Ken Tatsuta, Kadoma, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka-fu, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
3562374 ; 3562375 ; 3562373 ;
Abstract
An optical element is provided, to move an optical axis of a scanning light incident to a substrate so that illumination positions on photodetecting faces of two photodetectors agree or almost agree with each other. Respective surface information signals sent out from the two photodetectors are accordingly agreed or a difference of the signals is minimized, whereby the measuring accuracy in surface inspection is improved.