The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 1999
Filed:
Feb. 07, 1997
William John Boardman, Colorado Springs, CO (US);
John Crumlin, Colorado Springs, CO (US);
John Ralph Lindsey, Colorado Springs, CO (US);
Paul Thomas Carson, Colorado Springs, CO (US);
Judd Steven Carper, Colorado Springs, CO (US);
John Ames, Colorado Springs, CO (US);
Paul Elwin Stevenson, Colorado Springs, CO (US);
Ford Motor Company, Dearborn, MI (US);
Abstract
A protective coating is utilized to protect the silicon during a wet chemical etch step in the process of making a micromachine, thereby preventing the formation of etched holes or pits in the micromachine. In another embodiment, silicon sacrificial pedestals are used to eliminate or greatly reduces the electrical potential difference between metal on the glass substrate and the silicon, thereby eliminating arcing and the resulting damage to silicon and metal. These pedestals may be removed after the anodic bond.