The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 29, 1999

Filed:

Sep. 03, 1997
Applicant:
Inventors:

Naohiko Maruno, Tokyo, JP;

Seiichi Yokoyama, Tokyo, JP;

Hiroji Ito, Tokyo, JP;

Fumio Kaise, Tokyo, JP;

Yukimitsu Sekimori, Tokyo, JP;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
310309 ; 73718 ; 73724 ; 361283 ; 361284 ;
Abstract

The present invention provides an electrostatic capacitance type transducer and a method for producing the same, with the ensured sufficient connecting strength and insulation between a movable electrode and a fixed electrode and smooth production. In the electrostatic capacitance type transducer having: a substrate; a movable electrode placed on the opposite side of a space from the substrate and having displacement in relation to the substrate; and a fixed electrode formed on a detecting face of the substrate which is opposite to the movable electrode, an insulation film is formed on the approximately whole surface, including the fixed electrode, of the detecting face of the substrate, in which the substrate and the movable electrode are connected through the insulation film to each other by means of the anode-contact.


Find Patent Forward Citations

Loading…