The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 1999
Filed:
May. 30, 1997
Peter Mahneke, Buchholz, DE;
The Fairchild Corporation, Dulles, VA (US);
Abstract
Disclosed is an apparatus and a method for spin coating chemicals over a surface of a substrate. The apparatus includes a bowl for supporting a substrate, the bowl has a plurality of drain holes defined below the level of the substrate. The apparatus further includes a lid having a flat surface configured to lie a predetermined distance above the substrate and mate with the bowl. Further, a plurality of injection holes defined in the bowl for applying a solvent to an underside of the substrate are included. The plurality of injection holes are defined in along an injection ring that is configured to receive the liquid solvent that is to be applied near an outer radius of the underside of the substrate, and the injection ring is spaced apart from the underside of the substrate.