The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 1999
Filed:
Dec. 24, 1996
Yun-jeon Moon, Suwon, KR;
Seong-il Kim, Suwon, KR;
Jeong-suk Kim, Suwon, KR;
Won-yeal Sin, Suwon, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
An HMDS supplying apparatus capable of sensing the flow of hexamethyldisilazane through a flowmeter and to control the amount thereof which is flowing, to thereby prevent a lowering of productivity due to inadequate or excessive flow amounts. The HMDS supplying apparatus includes a carrier gas supplier for supplying a carrier gas for HMDS; a container connected to the carrier gas supplier adapted for containing HMDS therein; a flowmeter for controlling the amount of flowing HMDS supplied together with the carrier gas from the container; and an HMDS processor for depositing HMDS supplied via the flowmeter on the surface of a wafer; wherein the apparatus further includes: an indicator for indicating the level of HMDS in the flowmeter; and an optical sensing device having an optical source and an optical sensor, for controlling the flow of HMDS by sensing whether the indicator is located at an optimum position.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile