The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 1999
Filed:
Apr. 11, 1997
Applicant:
Inventors:
Frederic Castellanet, Le Pecq, FR;
Pierre Briend, Seyssinet, FR;
Jean-Claude Boissin, Saint Ismier, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F17C / ;
U.S. Cl.
CPC ...
62 502 ; 62908 ;
Abstract
In order to deliver ultrapure helium to a utilization line (1), helium is withdrawn, in liquid or supercritical form, from a storage tank (3), it is filtered in this liquid or supercritical form (at 4), the filtered helium is vaporized and the resulting helium gas is sent to the utilization line (1). The process is applicable to the cooling of integrated-circuit wafers.