The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 1999
Filed:
Sep. 04, 1997
Applicant:
Inventors:
George H Seaman, Colorado Springs, CO (US);
Gary R Thornberg, Colorado Springs, CO (US);
Assignee:
LSI Logic Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F16K / ;
U.S. Cl.
CPC ...
137377 ; 137382 ; 137559 ; 137883 ;
Abstract
To provide high purity gases to manufacturing tools, a gas isolation box is employed which is formed of stainless steel and includes vertical slots for receiving gas stick carrier cards. Gas sticks include required valves, gauges, and regulators rigidly mounted on stainless steel carrier cards, leak tested and labeled. The carrier cards with the rigidly mounted, leak tested gas sticks are slid into the vertical slots of the gas isolation box. Only two connections are then required to complete to gas lines, reducing the potential for flexing of high purity gas lines during installation.