The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1999
Filed:
Jul. 01, 1997
Kyu-Ho Hwang, Seoul, KR;
Yoon-Joon Choi, Seoul, KR;
Daewoo Electronics Co., Ltd., Seoul, KR;
Abstract
Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a supporting element for supporting the actuator and for preventing an initial deflection of the actuator. The actuator has a bottom electrode, an active layer, a top electrode. The supporting element has a supporting layer attached beneath the bottom electrode for supporting the actuator, a supporting member for supporting the actuator, the supporting member being formed between the substrate where the connecting terminal is formed and a bottom of a first portion of the supporting layer, and a secondary supporting member for preventing an initial deflection of the actuator, the secondary supporting member being formed between the substrate and a bottom of a second portion of the supporting layer. According to the present invention, the initial deflection of the actuator can be made uniform and a contrast of a picture projected onto a screen can be increased by reinforcing the secondary supporting member between the substrate and the supporting layer so as to reduce uneven residual stresses and stress gradients of an actuator.