The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1999
Filed:
Apr. 11, 1997
Applicant:
Inventor:
Stefan Kempf, Alzenau-Albstedt, DE;
Assignee:
Singulus Technologies GmbH, Alzenau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414226 ; 118500 ; 118502 ; 118503 ; 118728 ; 369270 ; 414908 ;
Abstract
Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4'). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.