The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1999
Filed:
Oct. 21, 1997
Suk-Bin Han, Chungcheongbuk-Do, KR;
LG Semicon Co., Ltd., Cheongju, KR;
Abstract
A wafer supporting and/or conveying apparatus includes at least one supporter having a plurality of recesses into which the edge of a wafer is inserted, for supporting the wafer inserted into the recesses at the lower portion of the wafer; a first connection rod for connecting the supporter to an actuator; at least two holding rods having a plurality of recesses into which the edge of a wafer is inserted, for holding the wafer at the top of its both sides; and a second connection rod for connecting the holding rods to the actuator. A connecting board is set between the first connection rod and supporter, or between the second connection rod and supporter, thereby increasing stability in the apparatus.