The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 1999
Filed:
Feb. 02, 1998
Applicant:
Inventors:
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ; B24B / ; G03F / ;
U.S. Cl.
CPC ...
430323 ; 445 24 ; 451 29 ; 451 30 ;
Abstract
In a method in which a top coating (2) on a relatively hard substrate (1) is patterned by means of a stream of kinetic particles while being masked by a mask (3), the substrate (1) is coated with a damping layer (4) of a ductile material before the top coating (2) is provided.