The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 1999
Filed:
Mar. 03, 1997
Takeshi Mitamura, Kanagawa-ken, JP;
Nissan Motor Co., Ltd., Kanagawa-ken, JP;
Abstract
An angular velocity sensor comprises a silicon substrate, a vibration mass formed separate from the silicon substrate on a principal surface of the silicon substrate to vibrate in directions along first and second orthogonal axes, supporting portions for supporting the vibration mass and positioned symmetrically with respect to the first axis and the second axis and having equal spring constants in directions along the first and second axes, drive electrodes and driving means for driving the vibration mass in the direction along the first axis, and detection electrodes and detecting means for detecting displacement of the vibration mass in the direction along the second axis. The drive and/or detection electrodes of the angular velocity sensor are split into a plurality of capacitors which permit a plurality of voltage values to be applied to capacitors. Accordingly, when the vibration mass is rotated around a third axis perpendicular to the principal surface of the substrate while vibrating in the direction along the first axis, an angular velocity around the third axis can be measured by detecting a Coriolis force generated in the direction along the second axis.