The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 1999
Filed:
Feb. 03, 1997
Steven A Voight, Gilbert, AZ (US);
Anthony Polito, Mesa, AZ (US);
Jeffrey Baker, Chandler, AZ (US);
Laura Siragusa, Chandler, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A method for fabricating an array of conical electron emitters (410) includes the steps of: (i) positioning a collimator (160), including a plurality of collimation cells (162) having hexagonal cross-sections, between a substrate (155) having emitter wells (130) and a target (170) made from the emitter material, (ii) sputtering the target (170) so that it is partially collimated by the collimator (160), (iii) moving the substrate (155) within a plane defined by the substrate (155) so that the emitter wells (130) follow an emitter well path (220) which forms a 15.degree. path angle (235) with respect to a reference line (240) of the collimator (160).