The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 1999
Filed:
Oct. 21, 1996
Applicant:
Inventors:
Andrew Thorton Appel, Dallas, TX (US);
Michael Francis Chisholm, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B24B / ; B24B / ; B24B / ;
U.S. Cl.
CPC ...
216 88 ; 438692 ; 156345 ;
Abstract
An apparatus integrating pad conditioning device (44) with a wafer carrier device (24) for chemical-mechanical polishing applications includes an attaching mechanism (45) for associating conditioning device (44) with wafer carrier device (24). Conditioning surface (84) of conditioning device (44) conditions the polishing pad associates with attaching mechanism (45). Carrier device (24) receives and holds wafer (42) so that wafer (42) and conditioning surface (44) contact the polishing pad (42) to simultaneously condition polishing pad (26) and polish wafer (42).