The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 1999
Filed:
Mar. 16, 1998
Applicant:
Inventor:
Stephen R Matte, Norfolk, MA (US);
Assignee:
Helix Technology Corporation, Mansfield, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
62 555 ; 417901 ;
Abstract
A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamber and surrounds the cryopanel to minimize the convective flow of gas past the cryopanel.