The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1999
Filed:
Sep. 18, 1998
Kiminori Hayano, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A semiconductor memory device has a memory cell area and a peripheral area including a scribe area. A large number of first monitoring patterns are disposed in the scribe area for monitoring the peripheral circuit in the peripheral area, whereas a few number of second monitoring patterns are disposed adjacent to the memory cell area for monitoring the characteristics of the memory cells. A CMP process which reduces the thickness of the memory device does not generate dust of the conductive material from the scribe area because the first monitoring pattern has a level substantially equal to the level of the peripheral area.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile