The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1999
Filed:
Apr. 08, 1996
Shinji Takayama, Mitaka, JP;
International Business Machines Corporation, Armonk, NY (US);
Abstract
A conductor line material is provided which has an extremely low electric resistance such as 10 .mu..OMEGA..multidot.cm or less, and in preferred embodiments, about 5 .mu..OMEGA..multidot.cm, which causes no defect such as hillocks and pinholes even at high temperatures, and which easily forms strong insulation films by anodic oxidation. An Al-based conductor line material comprising an alloy whose composition formula is substantially expressed by Al.sub.x (M.sub.y N.sub.1-y).sub.1-x, where M represents at least one element selected from a group consisting of rare-earth elements, N represents at least one element selected from a group consisting of Nb, Zr and Ta, x is between 98 and 99.5 atomic percent, and y is a number between 0.1 and 0.9, wherein an intermetallic compound of Al with said element represented by M or N is deposited in the matrix by subsequent heat treatment. The same object may be achieved by an alloy of Al to which 0.5-2.0 atomic percent Nb is added. The temperature of heat treatment in both cases is preferably in a range between 250 and 450.degree. C.