The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1999
Filed:
Aug. 14, 1997
Applicant:
Inventors:
Shunsuke Koshihara, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Naomasa Suzuki, Hitachinaka, JP;
Assignees:
Hitachi, Ltd., Tokyo, JP;
Hitachi Instruments Engineering Co., Ltd., Hitachinaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 250397 ; 250399 ; 2505051 ;
Abstract
In an electron microscope employing an X-ray spectrometer according to the present invention, a collimator is provided in a head portion of the X-ray spectrometer and a part of the collimator is arranged in a leakage magnetic field of an objective lens included in the electron microscope, whereby the orbits of the scattering electrons are curved and hence the scattering electrons are prevented from colliding with the X-ray spectrometer to dissolve the background noises in the X-ray spectrum