The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 1999

Filed:

Mar. 21, 1997
Applicant:
Inventors:

Cathy L Cowan, San Jose, CA (US);

Lau Y Hong, San Leandro, CA (US);

Assignee:

Semi-Gas Systems, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
422103 ; 96147 ; 422101 ;
Abstract

A docking station with a filter that sits inline in a process gas channel and that alternatively receives a loopback plate, a sensor plate and a removable purifier cartridge for particle removal as well as the removal of trace amounts of moisture, oxygen, and other chemical impurities from a gas stream. The removable purifier cartridge comprises a purifying medium with a pair of sealing poppet valves that automatically close when the cartridge is removed from the docking station. A block body is included in the docking station with gas line fittings for close gland-to-gland separations, while the purifier cartridge is off to one side, and not positioned directly in line between the glands.


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