The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1999
Filed:
Apr. 15, 1997
Sailesh Mansinh Merchant, Orlando, FL (US);
Binh Nguyenphu, Orlando, FL (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
The present invention provides methods of calibrating a deposition device, which is preferably a vapor deposition device, and more preferably is a physical vapor deposition device. One of the methods includes the steps of: (1) determining a resistance-temperature relationship of a substance located on a semiconductor wafer, a resistance of the substance being a function of a temperature of said semiconductor wafer; (2) placing the semiconductor wafer in the deposition device; (3) heating the heater to a known temperature; and (4) measuring a resistance of the substance, the resistance-temperature relationship allowing a relationship between a temperature of the semiconductor wafer and the known temperature to be determined, thereby to allow the deposition device to be calibrated.