The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1999
Filed:
Apr. 11, 1997
Applicant:
Inventors:
Ki-hum Nam, Suwon, KR;
O-yeon Han, Suwon, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27B / ;
U.S. Cl.
CPC ...
432152 ; 432241 ; 118715 ; 118724 ; 118725 ;
Abstract
A furnace used for a semiconductor manufacturing process includes an injector that can be formed as either two or more divided tubes, having a straight-line form with each of the tubes having different lengths and open ends, or by one straight injector having a closed end and a plurality of nozzles spaced along a length of the injector. Accordingly, the furnace can easily be cleaned and handled, and a reaction gas can be uniformly distributed in the processing tube.