The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1999
Filed:
Oct. 09, 1997
Cleopatra Cabuz, Edina, MN (US);
Thomas R Ohnstein, Roseville, MN (US);
William R Herb, Minneapolis, MN (US);
Honeywell Inc., Minneapolis, MN (US);
Abstract
An electrostatic actuator device including a stationary support and a buckled, moveable support mounted to enter into contact with the stationary support. At least three electrodes are employed. The first is mounted on the moveable support and a second electrode is on the stationary support. A third electrode is mounted on one of the supports such that the electrodes are positioned to form two pairs of electrodes for electrostatic attraction therebetween. The electrodes are powered by a voltage supply to provide electrostatic attraction between pairs of electrodes and move them into electrostatic contact. The buckled electrode has a shape configured to transmit a restoring force to its portion in contact with stationary support upon application of voltage to another pair of electrodes. The preferred voltage provides a two phase driving force including a voltage to the first pair of electrode for a period of time in a cycle of operation and a voltage to the second pair of electrodes for a period of time in the same cycle, preferably with an interim period of time with no voltage applied after each application of voltage. Various arrangements of three or more electrodes are disclosed, as is the use of the actuator in a microvalve having at least one valve opening. A three way microvalve is also shown, as are two forms of two dimensional valve arrays.