The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 1999
Filed:
Dec. 02, 1997
Joseph Logan, Jamestown, RI (US);
Robert Tompkins, Millbrook, NY (US);
Dorsey Gage, Inc., Poughkeepsie, NY (US);
Abstract
An electrostatic chuck employs thermoelectric cooling technology. The chuck includes a conductive circular base with an upper ring portion forming a first pole piece electrically isolated from an annular portion forming a second pole piece. The upper surface of the pole pieces have a dielectric material formed thereon and together form the electrostatic clamping surface for an article to be held thereon. The backside is provided with an annular recess containing a plurality of thermoelectric devices or modules and intervening spokes. The devices are covered with a heat sink or cooling plate through which a fluid such as water is circulated. A retaining back ring covers the water plate which is secured to the base by bolts. Uniform pressure is applied to the water plate and modules by means of spring washers inserted between back ring and water plate.