The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1999
Filed:
Oct. 11, 1996
Applicant:
Inventor:
Toru Morimoto, Kyoto, JP;
Assignee:
Dainippon Screen Mfg. Co., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F / ; G06G / ; G06G / ;
U.S. Cl.
CPC ...
36446815 ; 36446815 ; 36446817 ; 364183 ; 36447411 ;
Abstract
A method and apparatus for successively conveying substrates between a plurality of processing units, the processing units processing the substrates as required where, when one of the plurality of processing units raises an alarm to inform the user of the occurrence of some abnormality, the processing and conveyance of the substrates located on the transport path in and after either an alarm-raising processing unit or a predetermined skip-mode subject unit are completed; however the conveyance is suspended for the substrates located on the transport path before either the alarm-raising processing unit or the predetermined skip-mode subject unit.