The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 1999
Filed:
Feb. 21, 1997
Applicant:
Inventor:
Paul Fuchs, Schalchen, AT;
Assignee:
Wacker Chemie GmbH, Munchen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B / ; C30B / ; H05B / ; F27B / ;
U.S. Cl.
CPC ...
219411 ; 118 501 ; 118724 ; 118719 ; 219409 ; 392411 ; 392412 ; 392418 ; 427557 ; 438466 ; 438799 ;
Abstract
A method and device for heating silicon carrier bodies in a deposition reactor are by means of radiated heat. In this method, the carrier bodies are irradiated by means of a heat radiation device which emits radiation having a color temperature of at least 2000.degree. C.