The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 1999
Filed:
Dec. 19, 1996
Applicant:
Inventors:
Kenneth Raymond Carter, San Jose, CA (US);
Daniel Joseph Dawson, San Jose, CA (US);
Richard Anthony DiPietro, San Jose, CA (US);
Craig Jon Hawker, Los Gatos, CA (US);
James Lupton Hedrick, Pleasanton, CA (US);
Robert Dennis Miller, San Jose, CA (US);
Do Yeung Yoon, Los Gatos, CA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438624 ; 438624 ; 438623 ; 438781 ; 438790 ; 438633 ;
Abstract
The invention relates to a process for forming an integrated circuit device comprising (i) a substrate; (ii) metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises porous organic polysilica.