The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 1999
Filed:
Jun. 30, 1997
Kenneth Meade Lakin, Redmond, OR (US);
TFR Technologies, Inc., Bend, OR (US);
Abstract
A method for fabricating piezoelectric resonators on a substrate such that the resonant frequency of one resonator is shifted by a small amount from another of the resonators. By means of differential fabrication of the electrodes, the thickness of the metal in an electrode for one resonator is increased relative to that of another resonator to obtain the shift in resonant frequency. The frequency of a single resonator also may be adjusted to a specific frequency by the addition of a differential layer of metal to one of the electrodes comprising the resonator. Mask alignment errors in the differential fabrication process cause non-uniformities in the thickness of the metal in the electrode which non-uniformities significantly degrade the performance of the resonator. The areas of non-uniform thickness of electrode that degrade the performance are removed in this process.