The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 1999
Filed:
May. 30, 1997
Hitachi, Ltd., Tokyo, JP;
Abstract
The device of the present invention enables high resolution observation even when a sample is tilted. A deflecting electrode device for generating an electric field having a component in the direction perpendicular to the center axis (optical axis) of an objective lens is provided between the objective lens and the sample. A voltage applied to the deflecting electrode device is controlled in accordance with the tilting of a sample stage. A lateral electric field component generated on the optical axis when the sample stage is tilted is corrected by a deflected electric field generated by the deflecting electrode device. This is effective to suppress generation of astigmatism, and to allows effective arrival of an secondary electron at a secondary electron detector disposed at a position nearer the electron source side than the objective lens.