The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 1999
Filed:
May. 13, 1997
Tomoyuki Kubota, Susono, JP;
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Fixed electrodes (A through F) are formed by means of a structural layer that has been provided on fixed bodies (7.sub.1 through 7.sub.4) of a silicon micro-machined substrate and a movable electrode (G) is formed by a movable body attached to fixed bodies (5.sub.1 through 5.sub.4) by flexible members (6.sub.1 through 6.sub.4). Variable capacitors of the parallel plate-type are formed by the movable electrode (G) and the fixed electrodes (A through F). When the movable electrode (G) has been vibrated, the Coriolis force incident to rotation or the force incident to acceleration are added to the movable electrode (G), with a result that the charge of the various variable capacitors change. By detecting the change in charge, both angular velocity and acceleration can be obtained. By providing another variable capacitor formed by a mass portion (H) by a movable body and the substrate, acceleration components in the directions of three axes can be detected.