The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 1999
Filed:
Dec. 30, 1996
Yoshinobu Terui, Ayase, JP;
Speedfam Clean System Co., Ltd., Ayase, JP;
Abstract
Method for scrubbing flat disc-like work pieces in a running wash liquid, by the use of a wash liquid flow vessel 2 maintaining a continuous flow of a wash liquid in one direction, a work carrier 18 for holding a plural number of work pieces 4 in an immersed state and in parallel relation with the flow direction of the wash liquid, a slidable carriage 28 for transferring the work carrier 18 in a direction reverse to the flow direction of the wash liquid, and a scrubber means 20 having scrubbing brushes 38 for washing and scrubbing the work pieces 4 on the carrier 18 in an immersed state in the flow of the wash liquid.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile